Rotation stages, rotary tables and goniometers

Precision Rotation, Goniometers and Rotary Tables

Direct Drive Rotation Stages and High Precision Worm Gear Rotary Tables for Ambient and Vacuum

Rotation stages, often called index tables or rotary tables, are mechanisms used to precisely rotate a sample or specimen with high angular accuracy. Motorized rotary stages make use of a motion controller and stepper motor or - when higher performance is required - closed-loop servo motor, position feedback and computer control. Better performance, speed control and higher acceleration is achieved when using a direct-drive rotary table. For test of optics, often rotary air bearings are used, because of their extremely low excentricity and wobble.

Rotary Stage Drive Technologies

Motorized rotation stages use motion controllers, feedback and stepper, servo, piezo or torque motors to provide controlled angular positioning. Direct-drive rotary tables offer high speed, smooth motion, and no worm-gear transmission. Rotary air bearings provide the lowest eccentricity, wobble and friction, making them useful for optics, metrology and crystallography. Piezo-motor-driven rotary stages are compact, self-locking and stable at rest, while worm-gear rotary tables remain practical for high-load and vacuum-compatible positioning.

Rotation Stages and Rotary Positioners

Stackable goniometer with common center of rotation

L-866 Compact, Stackable Goniometer with Common Center of Rotation

  • Stackable design
  • 12° / 17° rotation range
  • 0.8 / 1.1 µrad sensor resolution
  • 10°/sec max. velocity
  • 3.5 kg load
  • A/B quad encoder

This compact closed-loop goniometer family allows stacking while maintaining a common center of rotation, ideal for optics and photonics alignment automation.

High-performance direct-drive rotation table

V-610 Compact, High-Speed Direct-Drive Rotary Table

  • Low-profile rotary design
  • High performance with 3-phase direct drive motor
  • High angular speed: 3000°/sec
  • Direct-metrology encoder
  • Clear aperture

This compact closed-loop direct-drive rotary table uses a 3-phase motor for maintenance-free, frictionless power transmission.

V-622 V-623 direct-drive rotation stage

V-622 / V-623 High-Performance Direct-Drive Rotary Tables

  • Direct drive with high speed and performance
  • Eccentricity and flatness <1 µm
  • High angular speed: 7200°/sec / 120 RPM
  • Direct-metrology encoder
  • Clear aperture

The V-62x direct-drive ball-bearing rotation stages are designed for industrial precision, high stiffness, long lifetime, high repeatability, and excellent geometric performance.

Video: V-622, V-623 and V-625 ball-bearing rotation stages in action.

M-660 PILine rotation stage Two ultrasonic piezo motors driving a circular ceramic runner

Two ultrasonic piezo motors driving a circular ceramic runner in an M-660 rotation stage.

Ultra-Low-Profile Direct-Drive Rotation Table with Ironless Piezo Motor

  • Only 14 mm profile height
  • Velocity to 720°/sec
  • Ironless piezo motor
  • Unlimited travel range
  • Self-clamping ceramic direct drive
  • Direct encoder to 4 µrad resolution
  • Vacuum-compatible and non-magnetic working principle

The M-660 / U-651 rotation table uses ultrasonic piezo motors for high stability, fast acceleration, low inertia, and no heat generation at rest.

Application video of the silent ultrasonic piezo motor rotary stage in a Leica theodolite and PILine drive principle.

U-628 miniature precision rotation stage

U-628 High-Speed Miniature Direct-Drive Rotation Table

  • Compact opto-mechanical setups
  • 2 x 2 inch footprint
  • 720°/sec max. speed
  • 35 µrad encoder resolution
  • Clear aperture
  • Continuous rotation
  • Closed-loop ultrasonic motor direct drive

This miniature closed-loop rotary positioner is driven by an ultrasonic direct-drive motor and provides high rotational velocity with direct position feedback.

Video: Ultrasonic Motor Operating Principle.

U-624 mini precision rotation stage Vacuum-compatible mini rotary stage

U-624 / U-622 Sub-Miniature Rotation Stage with Fast Ultrasonic Motor

  • As small as Ø20 x 10 mm
  • Speed to 2 revolutions/sec
  • 35 µrad encoder resolution
  • Ultrasonic ceramic motor
  • Vacuum version available

These sub-miniature rotation stages are available in standard and vacuum versions. A ring-shaped ultrasonic ceramic motor provides high speed and an encoder provides position feedback.

Ultrasonic mini rotary stage operating principle.

Ultra-compact rotation stage

Ultra-Low-Profile Mini Rotation Stages with Stick-Slip Piezo Motors

  • 14, 22 and 32 mm diameters
  • Vacuum option
  • Low profile from 7 mm
  • Continuous rotation
  • Piezo stick-slip motor
  • 45°/sec
  • Very high resolution

Q-motion miniature rotation stages use inertia-type piezo motors for backlash-free direct drive, micro-radian resolution, and self-locking long-term position stability.

Air bearing rotation stage family Low-profile rotary air bearing stage

Low-profile air bearing rotary table, directly driven with 3-phase motor.

Custom 300 mm air bearing stage

Custom 300 mm air bearing stage. Read article on large air bearing rotary tables for synchrotron crystallography.

Air-Bearing Ultra-High-Precision Direct-Drive Rotary Tables

  • Highest precision and resolution
  • Torque motor
  • Standard and custom diameters
  • Payloads up to 900 lb / 425 kg
  • Eccentricity as low as 0.075 µm
  • High repeatability
  • Velocity up to 2500 RPM

PI air-bearing rotation stages provide reference-class rotary motion with extremely low eccentricity, wobble, friction, and wear.

Compact motorized air bearing stage video.

Spherical air bearing — 3 rotational degrees of freedom.

Vacuum precision rotation stage UPR200 rotation stage

Vacuum-Compatible Precision Rotation Stage with Worm Gear

  • High load capacity to 50 kg
  • UHV option
  • Large aperture
  • Speed to 150°/sec
  • Continuous rotation
  • Ultra-high resolution
  • Preloaded worm drive
  • Servo and stepper motors

PRS-200 rotation stages handle high loads and provide large apertures for optics, photonics, and vacuum applications.

M-06x precision rotation stage

M-06x Precision High-Resolution Rotation Tables

  • Three sizes and load ranges
  • Vacuum option
  • Speed to 90°/sec
  • Continuous rotation
  • Ultra-high resolution
  • Preloaded worm drive
  • Servo, stepper and manual drive options

M-06x rotation stages use ultra-precise spring-preloaded worm gear drives for continuous rotation in compact precision positioning systems.

M-116 precision rotation stage

M-116 Precision Miniature High-Resolution Rotation Table

  • Miniature rotation stage
  • Combines with M-110 translation stages
  • Clear aperture
  • 2.5 µrad encoder resolution
  • 20°/sec velocity
  • Home switch
  • Preloaded worm drive

M-116 rotation stages provide compact continuous rotation using low-friction, spring-preloaded worm gear drives.

Additional Precision Rotation Stages and Goniometer Cradles from PI miCos

PI miCos rotation stages and goniometer cradles
  • High-speed air bearing precision rotation stages
  • High-vacuum and UHV-compatible rotation stages
  • Ultra-high-precision closed-loop rotation stages with torque motors
  • Compact rotation stages
  • Goniometer cradles
  • Tip/tilt stages

The PI miCos line includes miniature rotary stages, goniometers, belt drives, worm-gear drives, torque motors, direct metrology and air bearings. Many versions are available for high vacuum and UHV.

Rotation and XY stage

Concept: Integrated Rotation + XY Stage: Planar 3-Axis Precision Positioner

  • 8° rotation around Z
  • 20 x 20 mm XY travel
  • ActiveDrive servo motors
  • Static load capacity to 150 kg
  • Low profile through parallel kinematics
  • Large clear aperture

This 3-axis parallel-kinematic precision positioner combines Z rotation and XY motion in a low-profile package.

Miniature vacuum hexapod

Compact Vacuum Hexapod: 3 Rotations + XYZ Motion

  • Rotation around X, Y and Z
  • Linear XYZ motion
  • Vacuum compatible
  • Specialized 6D controller and software
  • Rotation to 40°
  • Load capacity to 5 kg
  • Velocity to 10 mm/sec

This compact hexapod provides 6 degrees of freedom for complex motion profiles with programmable rotation centers in restricted or vacuum spaces.

Precision piezo Z tip tilt stage

P-528 Precision Piezo Z / Tip / Tilt Stage

  • Z motion + two rotations
  • Up to 2 mrad rotation
  • Nanoradian resolution
  • Parallel kinematics and metrology
  • Frictionless flexure guidance
  • Capacitive feedback

P-5x8 piezo Z/tip/tilt nanopositioners provide high-resolution Z motion and two-axis rotation with a large clear aperture.

Goniometer cradle

Goniometer Cradles: Precision Rotation with a Fixed Pivot Point

  • Several models
  • 10° to 90° rotation range
  • 2.7 to 50 µrad minimum incremental motion
  • Velocity to 15°/sec
  • Loads to 20 kg
  • Direct encoder option

Goniometric cradles rotate samples and objects to a precise angular position around a fixed pivot point. Precision servo and stepper motors with high-resolution encoders are available.

S-335 miniature piezo tip tilt mirror

Two-Axis Θx Θy Piezo Mirror Positioner

  • Coplanar rotation axes
  • Fixed pivot point
  • Optical deflection to 70 mrad
  • Resolution to 100 nrad
  • Millisecond response
  • Closed-loop position servo control
  • Frictionless flexure guidance

The S-335 rotates a mirror around Θx Θy X and Y axes using solid-state piezo drives and a parallel-kinematic flexure design.

S-340 piezo tip tilt platform

Two-Axis Θx Θy Piezo Mirror Positioner for Optics to 4 inch Diameter

  • Coplanar rotation axes
  • Fixed pivot point
  • Optical deflection to 4 mrad
  • Resolution to 20 nrad
  • High temperature stability
  • Millisecond response
  • Closed-loop control

The S-340 rotates larger mirrors and optics around two orthogonal axes with solid-state piezo drives and parallel kinematics.

S-224 miniature piezo tilt mirror

Θy Piezo Mirror Tilter with 50 Nanoradian Resolution

  • Sub-µrad resolution
  • Sub-millisecond response
  • 4.4 mrad optical beam deflection
  • Closed-loop versions
  • BK7 mirror included
  • Zero-friction flexure guidance

This miniature tilt platforms provide fast single-axis mirror rotation with very high resolution in a compact package.

Ultrasonic Piezo Motor Principle

Ultrasonic piezo motors driving a circular ceramic runner

Two ultrasonic piezo motors driving a circular ceramic runner in an M-660 rotation stage.

PILine ultrasonic piezo motor principle

Ultra-slow animation of the PILine ultrasonic piezo motor. The ceramic tip moves on a pseudo-elliptical trajectory; in reality, the motion is only a few nanometers at ultrasonic frequency.

What Rotation Stages and Rotary Positioners does PI Provide?

PI provides a wide variety of precision rotation stages for high-accuracy and standard precision positioning applications.
Different stage drive concepts, from ironless piezo-motors, air-bearings / torque motors to compact worm-gear rotary positioners with encoded and open-loop stepper-motors to the ultra-low profile, self-locking piezo-motor rotation stages are available in standard and custom designs. Air bearing stages provide extremely accurate motion with minimum wobble and excentricity and are recommended for applcations such as X-ray crystallography.

Piezo-motor-driven stages are self locking at rest, a great advantage when it comes to long term stability and when applications require power to be shut down. The low inertia of the piezo-rotation stages also enables very fast step and settle with minimum overshoot.

In addition to classical worm gear rotation stages for ambient and vacuum environments, goniometer cradles are available, tip/tilt positioners , piezo mirror rotators with fixed center of rotation and even multiaxis parallel positioners such as hexapods with fully programmable center of rotation for three rotary axes.

Miniature and sub-miniature rotary positioners are now available in a variety of sizes, with profiles as low as 7 mm and rotation speeds as high as 1000 deg/sec.

Most positioning systems are also available for vacuum and high vacuum environments.

PDF Brochure: Motorized Ultra High Accuracy Rotation Stage Brochure

Not all applications require rotation, for linear motion, linear actuators are aslo available.